Facilities

Explore process and characterization facilities available through INUP.

Process Tools

Process facilities supporting fabrication and processing activities.

Fabrication Tools

E-beam Lithography

Lithography

SVCS (4 Stack Furnace)

Deposition

ICPRIE

Etching

Glove Box

wirebond

Wire And Die Bonder Tpt Hb10

Dicing

Advanced Dicing Technology 7100-provectvs

EBeam

E-beam Evaporation ( Hhv ) - Hind Hi Vac Bc-300t

Characterization Tools

Facilities supporting electrical, material and device characterization.

3DNonContactProfilometer

3D Non Contact Profilometer

Cantisense

Cantisense

ConfocalMicroscope

Confocal Microscope

PhotovoltaicDevice

Photovoltaic Device Characterization System

MicroSystemAnalyser

Micro System Analyser

UprightMicroscopeNikon

Upright Microscope Nikon

ParametricAnalyser4

Parametric Analyser with 4 SMU

ParametricAnalyser3

Parametric Analyser with 3 SMU

Probe_Station_(Manual)

Probe Station (Manual) - Summit 11000B-M

Probe_Station_(Thermal)

Probe Station (Thermal) - Summit 12000B-AP

Probe_Station_(Vacuum)

Probe Station (Vacuum) - PLV50

solarcelltester

Solar Cell Tester

Spectroscopic Ellipsometer

Spectroscopic Ellipsometer