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  • Indian Institute Of Technology, Chennai-600036

Characterization Tools List

Tool Image Description
Tool

3D Non Contact Profilometer

A non contact surface profiler based on white light interferometry principle with many special features designed specifically for characterizing MEMS and semiconductor devices. Also allows stroboscopic in plane motion analysis and visualization

Brochure    Manual

Tool

Cantisense

For characterizing MEMS based cantilever devices for various applications

Tool

Confocal Microscope

A laser confocal microscope can be used to characterize surface roughness, device geometry, and device profile with a high degree of accuracy and repeatability. The system is equipped for polarization and differential interference contrast microscopy techniques.

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Tool

Photovoltaic Device Characterization System

A Photovoltaic Device characterization system that allows measurement of EQE (IPCE), IQE, Reflectance, Transmittance etc over a wide spectral range. Allows for different device probing methods.

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Tool

Micro System Analyser

Static and Dynamic analysis and visualization of MEMS structures and devices in 3 dimensions. Is capable of Laser doppler vibrometry for out of plane motion measurement, Stroboscopic in plane motion measurement and white light interferometry based surface profiling.

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Tool

Upright Microscope Nikon

An upright reflected light microscope with a manual stage capable of accurate 2D imaging and measurements with the accompanied software. Is also capable of bright/dark field imaging, polarisation microscopy and DIC microscopy.

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Tool

Parametric Analyser with 4 SMU

The semiconductor parameteric analyzer is a DC device characterization system supporting IV, CV, pulse/dynamic IV and more. The system has 4 Source Measuring Units (SMU) and one Capacitance Measuring Unit (CMU).

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Tool

Parametric Analyser with 3 SMU

The semiconductor parameteric analyzer is a DC device characterization system supporting IV, CV, pulse/dynamic IV and more. The system has 3 Source Measuring Units (SMU) and one Capacitance Measuring Unit (CMU).

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Tool

Probe Station (Manual) - Summit 11000B-M

Probing system for on chip characterization of different devices including on full wafers. Can be used for RF, device characterization and reliability testing in combination with the Parametric analyser, Vector Network Analyser or the LCR meters

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Tool

Probe Station (Thermal) - Summit 12000B-AP

Probing system for on chip characterization of different devices including on full wafers at different device temperatures. Can be used for RF, device characterization and reliability testing in combination with the Parametric analyser, Vector Network Analyser or the LCR meters

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Tool

Probe Station (Vacuum) - PLV50

Probing system for on chip characterization of different devices including up to 150 mm in a vacuum environment < 1×10-5 mbar.Can be used for RF, device characterization and reliability testing in combination with the Parametric analyser, Vector Network Analyser or the LCR meters

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Solar Cell Tester

The Solar Cell I-V Curve Data Acquisition System characterizes the current-voltage (I-V) characteristics of photovoltaic devices with currents up to 20.0 amperes. It calculates the solar cell parameters, generates printable test reports and saves test data in text files

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Spectroscopic Ellipsometer

Thin film characterization equipment that can be used to measure the thickness, optical and dielectric properties of light transmitting thin films with high precision and accuracy

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